Kniha Doping Engineering for Front-End Processing: Volume 1070 B. J. PawlakM. L. PelazM. LawK. Surugo

Doping Engineering for Front-End Processing: Volume 1070

Jazyk: Angličtina
Vazba: Pevná
Dostupnost: Skladem u dodavatele
Odesíláme za 9-15 dnů
2 320
Materials scientists, silicon technologists and TCAD researchers come together in this book to share...

Informace o knize

Jazyk
Angličtina
Vazba
Kniha - Pevná
Vydáno
2008
Stránek
319
EAN
9781605110400
ISBN
160511040X
Enbook ID
02060462
Hmotnost
568
Rozměry
157 x 235 x 23

Kompletní popis

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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