Handbook of Advanced Plasma Processing Techniques

Name: Handbook of Advanced Plasma Processing Techniques
Brand: Springer, Berlin
SKU: 9783642630965
Price: 8155 CZK
Availability: InStock

Autor: R.J. Shul, S.J. Pearton

Jazyk:

Vazba: Brožovaná

Vydavatel: Springer, Berlin

Dostupnost: Skladem u dodavatele

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8 155 Kč

This volume covers the topic of advanced plasma processing techniques, from the fundamental physics...

Informace o knize

Autor

R.J. Shul, S.J. Pearton

Jazyk

Angličtina

Vazba

Kniha - Brožovaná

Vydáno

2012

Stránek

655

EAN

9783642630965

ISBN

3642630960

Enbook ID

02685078

Vydavatel

Springer, Berlin

Hmotnost

1015

Rozměry

155 x 235 x 35

Kompletní popis

This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.

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Handbook of Advanced Plasma Processing Techniques

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