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Kniha Ion Sources hang Huashun

Ion Sources

Autor: hang Huashun
Jazyk: Angličtina
Vazba: Pevná
Vydavatel: Springer, Berlin
Dostupnost: Skladem u dodavatele
Odesíláme za 10-13 dnů
5 023 Kč
Ion implantation has become a basic technology in device manufacturing. For efficient use of this ac...

Informace o knize

Autor
hang Huashun
Jazyk
Angličtina
Vazba
Kniha - Pevná
Vydáno
1999
Stránek
476
EAN
9783540657477
ISBN
3540657479
Enbook ID
01566924
Vydavatel
Springer, Berlin
Hmotnost
894
Rozměry
156 x 234 x 26

Kompletní popis

Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.

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