Kniha Laser Damage in Calcium Fluoride Stephan Rix

Laser Damage in Calcium Fluoride

A theoretical approach to radiation damage

Autor: Stephan Rix
Jazyk: Angličtina
Vazba: Brožovaná
Dostupnost: Skladem u dodavatele
Odesíláme za 8-11 dnů
1 376
Calcium fluoride is a key lens material in deep-ultraviolet microlithography. However, exposure to h...

Informace o knize

Autor
Jazyk
Angličtina
Vazba
Kniha - Brožovaná
Vydáno
2011
Stránek
132
EAN
9783838128108
ISBN
3838128109
Enbook ID
07065434
Hmotnost
204
Rozměry
152 x 229 x 8

Kompletní popis

Calcium fluoride is a key lens material in deep-ultraviolet microlithography. However, exposure to high fluences of the application wavelength, 193 nm, results in coloring of the material and degrading of its optical properties. Based on theoretical modeling and with the support of experimental evidence, the damage process is discussed from the initial matter-light interaction to the formation of complex radiation damage structures. Understanding laser damage or radiation damage in general is crucial for the development of future high-performance optical materials.

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