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Lecture Notes on Principles of Plasma Processing

Name: Lecture Notes on Principles of Plasma Processing
Brand: Springer Netherlands
SKU: 9780306474972
Price: 3426 CZK
Availability: InStock

Autor: Jane P. Chang, Francis F. Chen

Jazyk:

Vazba: Brožovaná

Vydavatel: Springer Netherlands

Dostupnost: Skladem u dodavatele

Odesíláme za 5-8 dnů

3 426 Kč

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma...

Informace o knize

Autor

Jane P. Chang, Francis F. Chen

Jazyk

Angličtina

Vazba

Kniha - Brožovaná

Vydáno

2005

Stránek

208

EAN

9780306474972

ISBN

0306474972

Enbook ID

01379576

Vydavatel

Springer Netherlands

Hmotnost

524

Rozměry

210 x 279 x 11

Kompletní popis

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes.§This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.