Kniha Lithography Michael Wang

Lithography

Autor: Michael Wang
Jazyk: Angličtina
Vazba: Pevná
Vydavatel: In Tech
Dostupnost: Skladem u dodavatele
Odesíláme za 10-13 dnů
3 436
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in...

Informace o knize

Autor
Jazyk
Angličtina
Vazba
Kniha - Pevná
Vydáno
2010
Stránek
680
EAN
9789533070643
ISBN
9533070641
Enbook ID
24118972
Vydavatel
Hmotnost
1270
Rozměry
170 x 244 x 37

Kompletní popis

Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits.

This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.

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