Materials and Processes for Submicron Technologies

Name: Materials and Processes for Submicron Technologies
Brand: Elsevier Science & Technology
SKU: 9780080436173
Price: 3217 CZK
Availability: InStock

Autor: J. M. Martinez-Duart, R. Madar, R. a. Levy

Jazyk:

Vazba: Pevná

Vydavatel: Elsevier Science & Technology

Dostupnost: U nakladatele na objednávku

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The European Materials Society decided to hold a Symposium entitled Materials and Processes for Subm...

Informace o knize

Autor

J. M. Martinez-Duart, R. Madar, R. a. Levy

Jazyk

Angličtina

Vazba

Kniha - Pevná

Vydáno

1999

Stránek

180

EAN

9780080436173

ISBN

008043617X

Enbook ID

04490729

Vydavatel

Elsevier Science & Technology

Hmotnost

570

Rozměry

210 x 279

Kompletní popis

The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).

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Materials and Processes for Submicron Technologies

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