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Kniha Organic Peracid Etches Daniel Georg Possner

Organic Peracid Etches

Novel chromium-free etching solutions for the delineation of crystalline defects in thin silicon films

Autor: Daniel Georg Possner
Jazyk: Angličtina
Vazba: Brožovaná
Vydavatel: Sudwestdeutscher Verlag Fur Hochschulschriften AG
Dostupnost: Skladem u dodavatele
Odesíláme za 5-8 dnů
1 669 Kč
Delineation of crystalline defects in silicon substrates and thin films by chemical etching in combi...

Informace o knize

Autor
Daniel Georg Possner
Jazyk
Angličtina
Vazba
Kniha - Brožovaná
Vydáno
2010
Stránek
192
EAN
9783838118536
ISBN
3838118537
Enbook ID
07048583
Vydavatel
Sudwestdeutscher Verlag Fur Hochschulschriften AG
Hmotnost
290
Rozměry
152 x 229 x 11

Kompletní popis

Delineation of crystalline defects in silicon substrates and thin films by chemical etching in combination with light optical microscopy is a well established method for quality control. It is still the workhorse for a quick and simple evaluation of defect types and area densities. Most of the etching solutions used today have two disadvantages. They contain hexavalent chromium which is highly toxic and they are not suitable for application on thin silicon films. A new class of chromium free etching solutions containing organic peracids was developed. These solutions are able to reveal different crystalline defects like oxidation induced stacking faults (OSF), dislocations and vacancy agglomerates (D-defects)in SOI and sSOI.

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