Plasma-Surface Interactions and Processing of Materials

Name: Plasma-Surface Interactions and Processing of Materials
Brand: Springer Netherlands
SKU: 9780792305842
Price: 6845 CZK
Availability: InStock

Autor: Orlando Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm

Jazyk:

Vazba: Pevná

Vydavatel: Springer Netherlands

Dostupnost: Skladem u dodavatele

Odesíláme za 10-13 dnů

6 845 Kč

An understanding of the processes involved in the basic and applied physics and chemistry of the int...

Informace o knize

Autor

Orlando Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm

Jazyk

Angličtina

Vazba

Kniha - Pevná

Vydáno

1990

Stránek

558

EAN

9780792305842

ISBN

0792305841

Enbook ID

01392866

Vydavatel

Springer Netherlands

Hmotnost

980

Rozměry

156 x 234 x 31

Kompletní popis

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

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Plasma-Surface Interactions and Processing of Materials

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