Plasma-Surface Interactions and Processing of Materials

Name: Plasma-Surface Interactions and Processing of Materials
Brand: Springer Netherlands
SKU: 9789401073691
Price: 6845 CZK
Availability: InStock

Autor: O. Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm

Jazyk:

Vazba: Brožovaná

Vydavatel: Springer Netherlands

Dostupnost: Skladem u dodavatele

Odesíláme za 5-8 dnů

6 845 Kč

An understanding of the processes involved in the basic and applied physics and chemistry of the int...

Informace o knize

Autor

O. Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm

Jazyk

Angličtina

Vazba

Kniha - Brožovaná

Vydáno

2011

Stránek

558

EAN

9789401073691

ISBN

9401073694

Enbook ID

02185022

Vydavatel

Springer Netherlands

Hmotnost

872

Rozměry

155 x 235 x 29

Kompletní popis

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. §The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. §The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

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Plasma-Surface Interactions and Processing of Materials

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