Predictive Simulation of Semiconductor Processing

Name: Predictive Simulation of Semiconductor Processing
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 9783540204817
Price: 5023 CZK
Availability: InStock

Status and Challenges

Autor: Jarek Dabrowski, Eicke R. Weber

Jazyk:

Vazba: Pevná

Vydavatel: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Dostupnost: Skladem u dodavatele

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Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Informace o knize

Autor

Jarek Dabrowski, Eicke R. Weber

Jazyk

Angličtina

Vazba

Kniha - Pevná

Vydáno

2004

Stránek

490

EAN

9783540204817

ISBN

3540204814

Enbook ID

01558777

Vydavatel

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Hmotnost

1028

Rozměry

155 x 235 x 36

Kompletní popis

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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Predictive Simulation of Semiconductor Processing

Status and Challenges

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Kompletní popis

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