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Kniha Predictive Simulation of Semiconductor Processing Jarek Dabrowski

Predictive Simulation of Semiconductor Processing

Status and Challenges

Autor: Jarek Dabrowski, Eicke R. Weber
Jazyk: Angličtina
Vazba: Brožovaná
Vydavatel: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Dostupnost: Skladem u dodavatele
Odesíláme za 5-8 dnů
5 023 Kč
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Informace o knize

Autor
Jarek Dabrowski, Eicke R. Weber
Jazyk
Angličtina
Vazba
Kniha - Brožovaná
Vydáno
2010
Stránek
490
EAN
9783642058042
ISBN
3642058043
Enbook ID
01651135
Vydavatel
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Hmotnost
859
Rozměry
155 x 235 x 28

Kompletní popis

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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