Rapid Thermal and Integrated Processing IV: Volume 387

Name: Rapid Thermal and Integrated Processing IV: Volume 387
Brand: Materials Research Society
SKU: 9781558992900
Price: 620 CZK
Availability: PreOrder

Autor: Steven R. J. BrueckJeffrey C. GelpeyAhman KermaniJorgé L. Regolini

Jazyk:

Vazba: Pevná

Vydavatel: Materials Research Society

Dostupnost: Očekávaný dotisk

Termín neznámý

620 Kč

The fourth in a continuing series on rapid thermal processing (RTP), this volume addresses work in t...

Informace o knize

Autor

Steven R. J. BrueckJeffrey C. GelpeyAhman KermaniJorgé L. Regolini

Jazyk

Angličtina

Vazba

Kniha - Pevná

Vydáno

1995

Stránek

455

EAN

9781558992900

ISBN

1558992901

Enbook ID

02060050

Vydavatel

Materials Research Society

Hmotnost

795

Rozměry

160 x 231 x 30

Kompletní popis

The fourth in a continuing series on rapid thermal processing (RTP), this volume addresses work in traditional RTP processes such as dielectric growth, annealing and silicides, as well as developments in integrated processes. The primary focus, however, is the manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs. Emphasis is placed on process and equipment modelling and the critical aspects of RTP, such as temperature measurement, uniformity and control. Topics include: modelling, sensors and control; integrated processing and manufacturing; dielectrics; epitaxy, polysilicon and devices; and junctions, metallization and contacts.

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Rapid Thermal and Integrated Processing IV: Volume 387

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