Spectroscopic Ellipsometry - Principles and Applications

Name: Spectroscopic Ellipsometry - Principles and Applications
Brand: John Wiley & Sons Inc
SKU: 9780470016084
Price: 4498 CZK
Availability: InStock

Autor: Hiroyuki Fujiwara

Jazyk:

Vazba: Pevná

Vydavatel: John Wiley & Sons Inc

Dostupnost: Skladem u dodavatele

Odesíláme za 10-18 dnů

4 498 Kč

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semicond...

Informace o knize

Autor

Hiroyuki Fujiwara

Jazyk

Angličtina

Vazba

Kniha - Pevná

Vydáno

2007

Stránek

392

EAN

9780470016084

ISBN

0470016086

Enbook ID

04878436

Vydavatel

John Wiley & Sons Inc

Hmotnost

762

Rozměry

157 x 235 x 26

Kompletní popis

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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Spectroscopic Ellipsometry - Principles and Applications

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Kompletní popis

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