Tantalum Oxide Thin Films for Embedded Capacitors

Name: Tantalum Oxide Thin Films for Embedded Capacitors
Brand: VDM Verlag Dr. Mueller E.K.
SKU: 9783639096620
Price: 1833 CZK
Availability: InStock

Using Pulsed DC Reactive Sputtering

Autor: Pushkar Jain

Jazyk:

Vazba: Brožovaná

Vydavatel: VDM Verlag Dr. Mueller E.K.

Dostupnost: Skladem u dodavatele

Odesíláme za 14-21 dnů

1 833 Kč

Embedded capacitor technology, where thin film §capacitors are integrated at on-chip and/or off-chip...

Informace o knize

Autor

Pushkar Jain

Jazyk

Angličtina

Vazba

Kniha - Brožovaná

Vydáno

2008

Stránek

212

EAN

9783639096620

ISBN

3639096622

Enbook ID

06818705

Vydavatel

VDM Verlag Dr. Mueller E.K.

Hmotnost

290

Rozměry

152 x 229 x 11

Kompletní popis

Embedded capacitor technology, where thin film §capacitors are integrated at on-chip and/or off-chip §levels, offers high packaging densities and improved §electrical performance at potentially reduced costs §of capacitor fabrication and integration. This §research explores and establishes the leverages of §using thin film embedded capacitors over currently §used surface mount discrete capacitors. In §particular, this work focuses on developing pulsed §dc reactively sputtered tantalum oxide (Ta2O5) thin §film capacitors for IC chips and packages. A design §space for breakdown voltage and capacitance density §of planar capacitors is established, with film §thickness and material dielectric constant as §parameters. The validity of the developed design §space is experimentally verified with Ta2O5 thin §films over a wide range of film thickness. An §experimentally verified analytical model for pulsed §dc reactive sputtering of Ta2O5 films is described §and evaluated. Various processing and integration §challenges in depositing thin films using reactive §sputtering and their effects on electrical §performance of thin-film capacitors are discussed.

Mohlo by vás zajímat

Zákaznicí kteří koupili tuto knihu koupili také

Nejčastěji hledané

Categories

Authors

Publishers

Produkty

Produkty

Nejčastěji hledané

Categories

Authors

Publishers

Produkty

Produkty

Tantalum Oxide Thin Films for Embedded Capacitors

Using Pulsed DC Reactive Sputtering

Informace o knize

Kompletní popis

Mohlo by vás zajímat

Zákaznicí kteří koupili tuto knihu koupili také