Toward Inertial-Navigation-on-Chip

Name: Toward Inertial-Navigation-on-Chip
Brand: Springer Nature Switzerland AG
SKU: 9783030254698
Price: 3198 CZK
Availability: InStock

The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

Autor: Haoran Wen

Jazyk:

Vazba: Pevná

Vydavatel: Springer Nature Switzerland AG

Dostupnost: Skladem u dodavatele

Odesíláme za 10-13 dnů

3 198 Kč

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement uni...

Informace o knize

Autor

Haoran Wen

Jazyk

Angličtina

Vazba

Kniha - Pevná

Vydáno

2019

Stránek

127

EAN

9783030254698

Enbook ID

24518988

Vydavatel

Springer Nature Switzerland AG

Hmotnost

454

Rozměry

155 x 235 x 14

Kompletní popis

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

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Toward Inertial-Navigation-on-Chip

The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

Informace o knize

Kompletní popis

Mohlo by vás zajímat

Zákaznicí kteří koupili tuto knihu koupili také